Real-time Analysis of Initial Oxidation Process on Si(001) by Means of Surface Differential Reflectance Spectroscopy and Reflectance Difference Spectroscopy

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ژورنال

عنوان ژورنال: Journal of the Vacuum Society of Japan

سال: 2010

ISSN: 1882-4749,1882-2398

DOI: 10.3131/jvsj2.53.413